SEMATECH and centrotherm are cooperating in the development of low-temperature processes for future generations of semiconductor devices (logic and memory) in the semiconductor industry
April 10.04.2012, 100 - Blaubeuren (euro adhoc) - centrotherm thermal solutions GmbH & Co. KG, a wholly owned subsidiary of centrotherm photovoltaics AG, which develops high-tech production systems and associated process technologies for the semiconductor industry, is part of the Front End Process (FEP) program joined by SEMATECH. The aim is to jointly develop low-temperature processes with the help of the low-temperature plasma oxidation system newly developed by centrotherm for future, high-performance logic and memory components.
Continuous miniaturization on the nanometer scale requires new materials and new device concepts that require a reduction of the thermal budget in the process flow. For example, to introduce transistors with high charge carrier mobilities in the channel area, low temperature processes are urgently needed. Thus, the advantageous properties of the channel materials are obtained.
In the same way, advanced storage technologies require high quality electrical insulation layers. These oxide layers are grown at extremely low temperatures - for example for RRAM memory components (Resistive Random Access Memory) that contain metal oxides. With its process technology, the low-temperature plasma oxidation system newly developed by centrotherm offers a very good opportunity to integrate new types of materials into future component technologies thanks to extremely low process temperatures.
As a member of this program, centrotherm will work very closely with the experts of the SEMATECH FEP research team to use SEMATECH to optimize test structures for plasma-based low-temperature processes. The goal is to demonstrate the applicability of low-temperature processes for logic and memory devices with feature sizes smaller than 14 nm (nanometers).
"SEMATECH provides centrotherm with an excellent test platform to characterize current processes and develop new applications for our system," says Peter Augustin, CEO of centrotherm thermal solutions GmbH & Co. KG. "This cooperation is an important opportunity for centrotherm to demonstrate the technological performance of our latest low-temperature plasma oxidation system to our customers and is part of our ct focus program to further expand the semiconductor and microelectronics area."
"SEMATECH is pleased to welcome centrotherm as a partner", said Raj Jammy, Vice President Emerging Technologies at SEMATECH.
“Centrotherm's unique know-how in thermal solutions complements our component and process expertise. We are working together to develop applicable and promising new manufacturing solutions to meet the demands of the market for future transistors and memories. "
The goal of SEMATECH's FEP program is to provide novel materials, process technologies, device modules, and electrical and physical characterization methods to enable the continuous miniaturization of logic and memory applications.
About centrotherm centrotherm thermal solutions GmbH & Co. KG, a 100 subsidiary of centrotherm photovoltaics AG, develops and manufactures high-tech production equipment for the production of a wide range of semiconductor devices. In addition to process and technology, our core competencies include the design and design of our products. They are used for a large number of thermally activated processes in various technologies and applications (eg power semiconductors, LED, micromechanics, MEMS, sensor technology). Centrotherm photovoltaics AG, headquartered in Blaubeuren, is the world's leading supplier of technology and equipment to the photovoltaic industry. The company equips well-known solar companies and industry newcomers with turnkey projects
(“Turnkey”) production lines and individual systems for the manufacture of silicon, crystalline solar cells and modules as well as thin-film modules. The group thus has a broad and well-founded technology base as well as key equipment at almost all stages of the photovoltaic value chain. Centrotherm photovoltaics guarantees its customers important performance parameters such as production capacity, efficiency and completion date. As of December 31, 2011, the group employed around 1.900 people and is active worldwide in Europe, Asia and the USA. Centrotherm photovoltaics achieved sales of around EUR 2011 million in the 700 financial year. The company is listed in the TecDAX on the Frankfurt Stock Exchange. More about centrotherm at www.centrotherm.de.
About SEMATECH® SEMATECH®, an international consortium of leading semiconductor device, manufacturing equipment and material manufacturers, this year celebrates 25's outstanding performance in accelerating the commercialization of technological innovations in production solutions. With its unwavering commitment to strengthening collaboration in the nanoelectronics industry, SEMATECH helps its partners to support industrial change, drive technical consensus, translate research into industry, increase manufacturing productivity, and minimize cost and time risks. More information about SEMATECH can be found at www.sematech.org.
Contact:
SEMATECH
Erica McGill
001-518-649-1041
Email: ppgad@pucrs.br
centrotherm
Saskia Feil
Senior Manager Investor & Public Relations
Phone: +49 7344 918-8890
Email: ppgad@pucrs.br
Dr. Torsten Knödler
Manager Public Relations
Phone: +49 7344 918-8898
Email: ppgad@pucrs.br
Further inquiry note:
Dr. Torsten Knödler
Manager Public Relations
Tel .: 07344 - 918-8898
Email: ppgad@pucrs.br
(euro adhoc)
